Relying on extremely low vapor pressure, excellent thermal stability and chemical inertness, vacuum diffusion pump oil has been deeply penetrated into many strategic fields such as electronic manufacturing, aerospace, metallurgy, and scientific research experiments. As the core consumable of vacuum diffusion pumps, its scene adaptability directly determines the operating efficiency and product quality of downstream equipment. Different fields have significant differences in the performance requirements of oil products, promoting the development of vacuum diffusion pump oil towards category segmentation and precise adaptation.
The electronic manufacturing field is the core application scenario of vacuum diffusion pump oil, accounting for more than 40%, among which semiconductor manufacturing has the most stringent requirements for oil products. In processes such as wafer etching, sputtering coating, and vacuum packaging, ultra-high vacuum diffusion pump oil (ultimate vacuum degree ≥10⁻⁹ Torr) is required. Its extremely low vapor pressure and oil return rate can avoid oil volatiles polluting the wafer surface, ensuring the precision and qualification rate of chips. For example, in a 12-inch wafer production line, the annual oil consumption of a single production line reaches 70-110 liters, and high-end products with metal ion content ≤0.1ppb need to be selected to adapt to the vacuum requirements of precision equipment such as ArF lithography machines. In addition, in the manufacture of TV picture tubes and microwave tubes, general-purpose diffusion pump oil can meet the vacuum requirements of 10⁻⁶~10⁻⁸ Torr, ensuring the insulation performance and service life of electronic devices.
In the aerospace and metallurgy fields, the high and low temperature resistance and radiation resistance of vacuum diffusion pump oil are fully exerted. In space simulation cabins and satellite component testing, the oil needs to remain stable in a wide temperature range of -50℃ to 300℃, resist cosmic ray erosion, achieve ultra-high vacuum above 10⁻¹⁰ Torr, and simulate the space environment to ensure test accuracy; in high-vacuum furnaces and refractory metal sintering, the oil can withstand high-temperature working conditions, avoid impurities generated by high-temperature decomposition, improve the purity and performance of metal materials, and is widely used in the smelting and processing of special metals such as titanium and tungsten.
In the field of scientific research experiments, vacuum diffusion pump oil is suitable for various cutting-edge scientific research scenarios. In large scientific devices such as quantum computing and controlled nuclear fusion, ultra-clean and ultra-high vacuum diffusion pump oil is required, which can achieve vacuum above 10⁻¹⁰ Torr without additional cooling traps, ensuring the accuracy of experimental data; in thin film research and metal fatigue testing, the low oil return rate and chemical inertness of the oil can avoid polluting experimental samples, providing reliable support for scientific research work. In addition, in the field of vacuum coating, whether it is decorative coating of architectural glass or coating of auto parts, diffusion pump oil can improve the uniformity and adhesion of the coating, optimizing the appearance and performance of products.